Metallurgists and researchers in steel manufacturing need scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDS) data for failure analysis and process improvement. The Thermo Scientific Phenom ParticleX Steel Desktop SEM is a multi-purpose desktop SEM enabling failure analysis and automated characterization of non-metallic inclusions in steel.

Steel inclusion analysis

This versatile solution for high-quality imaging and elemental analysis of steel samples provides the data needed for today’s efficient production of high-value steels. Rapid, easy analysis allows you to quickly respond to customer claims of faults, failures, etc., while the automated steel inclusion analysis provides you insight into the steelmaking process.

The Thermo Scientific Phenom ParticleX TC Desktop SEM is a multi-purpose desktop SEM enabling technical cleanliness at the microscale.

Materials characterization

A versatile solution for high-quality, in-house analysis, the Phenom ParticleX Desktop SEM gives you the ability to carry out speedy characterization, verification and classification of materials, supporting your production with fast, accurate and trusted data. The system is simple to operate and fast to learn, opening up particle and material analysis to a wider group of users.

The Thermo Scientific Phenom ParticleX Desktop Scanning Electron Microscope (SEM) is a multi-purpose desktop SEM designed for additive manufacturing, delivering purity at the microscale.

It is equipped with a chamber large enough to analyze samples up to 100 mm x 100 mm. The proprietary venting and loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput.

With the Phenom ParticleX AM Desktop SEM, you can take in-house control of your data:

• Monitor critical characteristics of metal powders
• Enhance your powder-bed and powder-fed additive manufacturing processes
• Identify particle size distributions, individual particle morphology, and foreign particles

Gunshot residue (GSR) analysis plays an important role in the determination if a firearm has been used in a crime. Established GSR analysis techniques are based on the use of a scanning electron microscope (SEM), which is used to scan the sample and find suspect GSR particles. If a suspect particle is found, an energy dispersive spectroscopy (EDS) technique is used to identify the elements in that particle.

The Thermo Scientific Phenom Perception GSR Desktop SEM is the only dedicated SEM specifically designed for gunshot residue analysis. Because the system is automated, it enables you to speed up the analysis process. With no need to change your settings each time, you can immediately focus on the task at hand.

A high-brightness CeB6 source is at the heart of the desktop Phenom system. This means that you can be confident it will provide reliable, long-lasting daily use and won’t need to be replaced unexpectedly. The Phenom Perception GSR Desktop SEM makes gunshot residue analysis on-demand, faster, easier and more reliable than ever before. Perfect for every busy lab that wants to save time and floor space.

• Dedicated gunshot residue solution
• Only needs a small lab space
• Stable operation, available 24/7
• Long lifetime CeB6 source

The Thermo Scientific Phenom Pure Desktop Scanning Electron Microscope (SEM) is an ideal tool for the transition from light optical to electron microscopy. It is an economical solution for high-resolution imaging, providing the best imaging results in its class.

The Phenom Pure Desktop SEM provides high-quality images thanks to the long-lasting, high-brightness CeB6 source, and offers the market’s fastest loading and imaging time. The very reliable autofocus and automated source alignments make this the most user-friendly system on the market.

The sixth-generation of Thermo Scientific Phenom Pro G6 Desktop SEM fills the gap between light microscopy and floor-model SEM analysis, thus expanding the capabilities of research facilities.

Fast and easy to use, the Phenom Pro G6 Desktop SEM can be used to relieve the burden of routine analysis for common samples from floor-model SEM instruments. Instrument configuration and the sample loading mechanism ensure quick imaging with minimal time spent tuning between experiments.

Facility users of any experience level can quickly begin producing high-quality results with the Phenom Pro G6 Desktop SEM. Its long-lifetime CeB6 source offers high brightness while requiring low maintenance. Additionally, its high stability and small form factor allow the instrument to be used in practically any lab environment; more simply put, it does not require specialized infrastructure or expert oversight.

The sixth-generation of Thermo Scientific Phenom ProX G6 Desktop SEM fills the gap between light microscopy and floor-model SEM analysis, thus expanding the capabilities of research facilities. It offers fast, high-resolution imaging in addition to an integrated energy-dispersive X-ray diffraction (EDS) detector for robust, easy-to-use, rapid elemental analysis.

In battery production and research, the quality of materials is becoming critical. Small contaminants in the NCM powder, for example, can have disastrous results in the final product. To trace these contaminants effectively, high-resolution SEM imaging with EDS analysis for chemistry is needed. When fully automated, this combination is a powerful tool for powder quality inspection.

The next-generation Thermo Scientific Phenom XL G2 Desktop Scanning Electron Microscope (SEM) automates your quality control process, providing accurate, reproducible results while freeing up time for value-added work.

The Phenom XL G2 Desktop SEM allow you to:

• Obtain the quality information you need to discover failures early and rapidly adjust your production process when needed.
• Automate quality control to process a high volume of samples with fewer chances of human error.
• Get up to speed quickly with an all-new, easy-to-learn interface ideal for a wide range of applications.

The Phenom XL G2 Desktop SEM features full-screen images and an average time-to image of 60 seconds. The unique CeB6 electron source offers a long lifetime with less maintenance. The small form factor requires little lab space, allowing you to place the microscope exactly where you need it.

Phenom XL G2 Argon-Compatible Desktop SEM

The Thermo Scientific Phenom XL G2 Argon-Compatible Desktop Scanning Electron Microscope (SEM) automates your workflows while providing a stable, non-reactive environment for your reactive sample research.

The Phenom XL G2 Argon-Compatible Desktop SEM offers your research:

• A non-reactive environment to conduct reactive sample research on samples such as solid state lithium batteries
• A modality where you can have sample preparation and SEM/EDX analysis in the same workspace
• A safer way to interface with highly volatile samples such as solid state lithium, enabling the next generation of longer-lasting, eco-friendly batteries

The Phenom XL G2 Argon-Compatible Desktop SEM boasts the same 60-second time to image as the Phenom XL G2 SEM, while also being able to be placed in an argon glove box, assuring the safe analysis of solid state lithium.

The Thermo Scientific Phenom Pharos G2 FEG-SEM brings field emission SEM to your tabletop. The Phenom Pharos G2 FEG-SEM will outperform many floor-standing SEMs in terms of image quality, while offering a vastly better user experience. For academic and industrial laboratories that so far did not consider SEM a realistic option, the Phenom Pharos G2 FEG-SEM makes FEG performance accessible thanks to its attractive form factor and short training required. Blazing fast sample loading means fast sample exchange, which means higher productivity. Unlike other SEMs, which end up being fully booked, the Phenom Pharos G2 FEG-SEM performs imaging and analysis jobs so quickly that it serves well as a walk-up tool.

The new Phenom Pharos G2 FEG-SEM expands its acceleration voltage range down to 1 kV, to better accommodate insulating and beam-sensitive samples, and up to 20 kV, with a resolution of 2.0 nm that reveals the finest details.

Higher sample throughput is enabled by the newly redesigned Smart Stage and the new Ultra-X EDS detection system. These features provide an approximate 15% TEM metrology performance increase and 2x faster EDS elemental analysis. The Smart Stage supports fully automated sample loading and precise navigation to the region of interest (ROI). The new constant power lenses enable high-tension switching in less than 20 minutes, increasing tool availability.

Fast elemental analysis

The Metrios 6 (S)TEM with the Ultra-X EDS detector brings a new level of EDS detection to high-throughput solutions. The advanced Ultra-X EDS detector provides a 4.45 srad solid angle, delivering at least 2x greater data collection efficiency than the previous generation of detectors. This enables collection of data in less time while preserving the integrity of beam-sensitive samples. In addition to these capabilities, Ultra-X unlocks new EDS analysis opportunities with the cleanest EDS spectra, (<1% spurious peaks).

Recipe-free automation for (S)TEM metrology

Recipe-free, full automation utilizes machine-learning algorithms to substantially reduce automation set-up time for each new process or sample type to provide ease-of-use and scalability. Application-specific Smart Automation supports a variety of semiconductor device types, such as gate-all-around (GAA), DRAM, and 3D NAND. The new web-based segmenter and object detection algorithm provide 50x faster model training on device structures. Additionally, Smart Automation is extensible to meet future advanced semiconductor R&D and manufacturing requirements.

Yield Ramp and Metrology

Improving semiconductor yield and accelerating production ramp can be challenging. The increasing 3D complexity of semiconductor devices is generating unprecedented demand for high-quality TEM metrology data. The Metrios 6 (S)TEM features state-of-the-art hardware and machine-learning-based automation software for reference metrology and process monitoring. This solution is designed to help semiconductor labs increase sample throughput and high-volume data acquisition to increase productivity and accelerate time-to-yield.

Physical and Chemical Characterization

Developing modern semiconductor devices requires physical, structural, and elemental characterization on atomic-scale defects with special consideration for electron-beam-sensitive materials. The Metrios 6 (S)TEM supports flexible imaging and characterization workflows for accurate root cause analysis and faster process development. Working on beam-sensitive materials depends on enhanced data collection efficiency and minimum electron-beam exposure to preserve data integrity. The Metrios 6 (S)TEM features the Ultra-X EDS detection system and fast high-tension switching for fast physical and elemental characterization of semiconductor devices.

Memory Device Metrology and Analysis

Manufacturing advanced memory devices, such as 3D NAND and DRAM, requires high-volume, precision TEM metrology on small, critical dimensions hidden in high-aspect-ratio structures. With fully automated workflows, the Metrios 6 (S)TEM delivers high-productivity, high-quality reference metrology and defect analysis for advanced memory device structures.