Higher sample throughput is enabled by the newly redesigned Smart Stage and the new Ultra-X EDS detection system. These features provide an approximate 15% TEM metrology performance increase and 2x faster EDS elemental analysis. The Smart Stage supports fully automated sample loading and precise navigation to the region of interest (ROI). The new constant power lenses enable high-tension switching in less than 20 minutes, increasing tool availability.

Fast elemental analysis

The Metrios 6 (S)TEM with the Ultra-X EDS detector brings a new level of EDS detection to high-throughput solutions. The advanced Ultra-X EDS detector provides a 4.45 srad solid angle, delivering at least 2x greater data collection efficiency than the previous generation of detectors. This enables collection of data in less time while preserving the integrity of beam-sensitive samples. In addition to these capabilities, Ultra-X unlocks new EDS analysis opportunities with the cleanest EDS spectra, (<1% spurious peaks).

Recipe-free automation for (S)TEM metrology

Recipe-free, full automation utilizes machine-learning algorithms to substantially reduce automation set-up time for each new process or sample type to provide ease-of-use and scalability. Application-specific Smart Automation supports a variety of semiconductor device types, such as gate-all-around (GAA), DRAM, and 3D NAND. The new web-based segmenter and object detection algorithm provide 50x faster model training on device structures. Additionally, Smart Automation is extensible to meet future advanced semiconductor R&D and manufacturing requirements.

Yield Ramp and Metrology

Improving semiconductor yield and accelerating production ramp can be challenging. The increasing 3D complexity of semiconductor devices is generating unprecedented demand for high-quality TEM metrology data. The Metrios 6 (S)TEM features state-of-the-art hardware and machine-learning-based automation software for reference metrology and process monitoring. This solution is designed to help semiconductor labs increase sample throughput and high-volume data acquisition to increase productivity and accelerate time-to-yield.

Physical and Chemical Characterization

Developing modern semiconductor devices requires physical, structural, and elemental characterization on atomic-scale defects with special consideration for electron-beam-sensitive materials. The Metrios 6 (S)TEM supports flexible imaging and characterization workflows for accurate root cause analysis and faster process development. Working on beam-sensitive materials depends on enhanced data collection efficiency and minimum electron-beam exposure to preserve data integrity. The Metrios 6 (S)TEM features the Ultra-X EDS detection system and fast high-tension switching for fast physical and elemental characterization of semiconductor devices.

Memory Device Metrology and Analysis

Manufacturing advanced memory devices, such as 3D NAND and DRAM, requires high-volume, precision TEM metrology on small, critical dimensions hidden in high-aspect-ratio structures. With fully automated workflows, the Metrios 6 (S)TEM delivers high-productivity, high-quality reference metrology and defect analysis for advanced memory device structures.

High-volume TEM data, accurate and repeatable

The Metrios AX TEM automates the basic TEM operation and measurement procedures, minimizing the requirements for specialized operator training. Its advanced automated metrology routines deliver significantly greater precision than manual methods. The Metrios AX TEM is designed to provide improved throughput and lower cost-per-sample than other TEMs.

The Thermo Scientific Talos F200C TEM is a 20-200 kV thermionic (scanning) transmission electron microscope uniquely designed for performance and productivity across a wide range of samples and applications, such as 2D and 3D imaging of cells, organelles, asbestos, polymers, and soft materials, both at ambient and cryogenic temperatures.

It elevates the imaging quality of beam-sensitive materials with its optional, motorized, retractable cryo-box and low-dose technique. Additionally, a side-entry retractable energy dispersive spectroscopy (EDS) detector can be added to the configuration to enable chemical analysis. The large C-Twin pole piece gap, which provides high application flexibility, combined with a reproducibly performing electron column, opens new opportunities for high-resolution 3D characterization, in situ dynamic observations, and diffraction applications, with a special emphasis on high-contrast imaging and cryo-TEM. The Talos F200C TEM is equipped with the fast 4k × 4k Thermo Scientific Ceta 16M Camera, which provides a large field-of-view and fast imaging, with high sensitivity, on a 64-bit platform.

Thermo Scientific Maps Software enables intuitive image-based navigation over a whole sample and easy correlation of results across imaging platforms. In order to retrieve large-area imaging at high-resolution Maps Software automatically acquires and stitches images to document the entire area of interest with exceptional quality. Maps Software can be used across tools and within the tool. It supports image import, overlay and alignment from other microscopes, such as SEM and light microscopy. This enables digital zoom from correlated low-magnification TEM and/or SEM to high-resolution TEM (HRTEM), which provides valuable contextual information.

The Thermo Scientific Talos L120C G2 (S)TEM is a 20-120 kV thermionic (scanning) transmission electron microscope uniquely designed for performance and productivity. It’s useful across a wide range of samples and applications, such as 2D and 3D imaging of cells, cell organelles, asbestos, polymers, and soft materials, both at ambient and cryogenic temperatures. The Talos L120C allows you to acquire high-quality results with minimal effort, no matter your skill level. Routine 2D imaging of samples is facilitated by a simple and intuitive user interface (UI). By implementing fast and sophisticated automation in advanced 3D imaging workflows with superior TEM and STEM resolution for 20-120 kV instrumentation, it allows you to focus on scientific questions rather than microscope operation.

Talos L120C (S)TEM) advantages

The Talos L120C takes imaging to the next level with the optional cryo-box and low-dose techniques, which facilitate imaging of samples preserved at cryogenic temperatures and produce high-quality images even for beam-sensitive materials. The cryo-box provides maximal protection of the cryo-specimen resulting in minimal ice growth contamination over long (>8 h) data collection sessions.

To enhance productivity and application flexibility, especially in multi-user and multi-application environments, the cryo-box is motorized and fully retractable to facilitate seamless switching between cryo-EM imaging, STEM imaging, and EDS analysis. The large pole-piece gap of the C-Twin lens provides high contrast and allows for high specimen tilts up to 90°, while the constant-power objective lens with low-hysteresis allows for straightforward and reproducible changes of imaging modes and high-tension settings in matter of seconds.

Overall, the Talos L120C (S)TEM combines application versatility with a reproducibly performing electron column to give you new opportunities for high-resolution 3D characterization, in situ dynamic observation with EDS and other diffraction applications, and a special emphasis on high-contrast imaging and cryo-TEM.\

Talos L120C (S)TEM automation

Designed for multi-user and multi-discipline environments and equipped with a familiar UI shared across all Thermo Scientific TEM platforms, the Talos L120C TEM is ideal for novice and expert users alike. All daily TEM tunings have been automated to provide the best and most reproducible setup, easing the learning curve for novice operators and improving time-to-data for experienced users. The Talos L120C TEM also offers educational online help embedded within the UI. Additionally, Thermo Scientific application software packages facilitate intuitive settings and automated data collection for different use cases and workflows, such as large area 2D imaging, energy dispersive X-ray analysis, single particle analysis, MicroED and tomography.

The Thermo Scientific Talos F200X STEM is a scanning transmission electron microscope that combines outstanding high-resolution STEM and TEM imaging with industry-leading energy dispersive X-ray spectroscopy (EDS) signal detection. 2D/3D chemical characterization with compositional mapping is performed by 4 in-column SDD Super-X detectors with unique cleanliness. The Talos F200X scanning transmission electron microscope allows for the fastest and most precise EDS analysis in all dimensions, along with high-resolution TEM and STEM (HRTEM and HRSTEM) imaging with fast navigation for dynamic microscopy. The Talos F200X scanning transmission electron microscope also features reduced environmental sensitivity; the instrument enclosure moderates the impact of air pressure waves, air flows, and fine temperature variations in the TEM room.

STEM imaging and chemical analysis

The Talos F200X (S)TEM delivers fast, precise, quantitative characterization of nanomaterials in multiple dimensions. With innovative features designed to increase throughput, precision, and ease of use, the Talos F200X (S)TEM is ideal for advanced research and analysis in academic, government, semiconductor and industrial environments.

The need for large area correlative imaging at high resolution has recently increased as it allows researchers to preserve the context of their observations while also providing statistically robust data. Thermo Scientific Maps Software (enabled by Thermo Scientific Velox Software) automatically acquires an array of images across a sample and stitches them together to create one large final image. Image acquisition can even be performed unattended. The APW (Automated Particle Workflow) pack has all the benefits described in this section and adds unique processing on a dedicated processing PC with Thermo Scientific Avizo2D Software. You can get nanoparticle parameters like size, area, perimeter, shape, factor, contacts, etc., in an automated way. The fully automated and unattended software pack enables you to use the Talos F200X (S)TEM 24/7, get much better statistics and significantly improve the repeatability because operator bias is not present.

Align Genie Automation Software eases the learning curve for novice operators, reduces tensions in a multi-user environment, and improves time-to-data for the experienced operator.

The Thermo Scientific Talos F200i (S)TEM is a 20-200 kV field emission (scanning) transmission electron microscope uniquely designed for performance and productivity across a wide range of Materials Science samples and applications. Its standard X-Twin pole piece gap—giving the highest flexibility in applications—combined with a reproducibly performing electron column opens opportunities for high-resolution 2D and 3D characterization, in situ dynamic observations, and diffraction applications.

Talos F200i Transmission Electron Microscope advantages

Designed for multi-user and multi-discipline environments, the Talos F200i (S)TEM is also ideal for novice users. It is equipped with the Thermo Scientific Velox user interface, which is immediately familiar since it is shared across all Thermo Scientific TEM platforms. All TEM daily tunings have been automated to provide the best and most reproducible setup. The Align Genie automation software eases the learning curve for novice operators, reduces tensions in a multi-user environment, and improves time-to-data for the experienced operator. A side-entry retractable Energy Dispersive X-ray Spectroscopy (EDS) detector can be added to the configuration to enable chemical analysis.

The Thermo Scientific Talos F200S (S)TEM is a (scanning) transmission electron microscope that combines outstanding high-resolution STEM and TEM imaging with industry-leading energy dispersive X-ray spectroscopy (EDS). The Talos F200S (S)TEM features great versatility and high through in STEM imaging and allows for precise EDS analysis and high-resolution TEM (HRTEM) for dynamic microscopy.

Talos F200S G2 Transmission Electron Microscope advantages

The Thermo Scientific Talos F200S 200kV (S)TEM combines fast, multichannel, high-resolution (S)TEM imaging and precise compositional analysis to enable dynamic microscopy applications. With innovative features designed to increase throughput, precision, and ease of use, the Talos (S)TEM is ideal for advanced research and analysis across academic, government, and industrial research environments.

For scientists to advance their understanding of complex samples and develop innovative materials, they must have access to robust, precise instrumentation capable of correlating form and function, as well as resolving space, time and frequency.

Thermo Fisher Scientific introduces the Thermo Scientific Spectra 200 (S)TEM, the high-throughput, aberration-corrected, (scanning) transmission electron microscope for all materials science applications.

Spectra 200 Scanning Transmission Electron Microscope advantages

All Spectra 200 (S)TEM’s are delivered on new platforms designed to offer an unprecedented level of mechanical stability and highest imaging quality though passive and (optional) active vibration isolation.

The system is housed in a fully re-designed enclosure with a built-in on-screen display for convenient specimen loading and removal. For the first time, full modularity and upgradeability can be offered between uncorrected and single-corrected configurations with variable heights, allowing maximum flexibility for different room configurations.

For scientists to advance their understanding of complex samples and develop innovative materials, they must have access to robust, precise instrumentation capable of correlating form and function, as well as resolving space, time and frequency.

Thermo Fisher Scientific introduces the Thermo Scientific Spectra 300 (S)TEM �the highest resolution, aberration corrected, scanning transmission electron microscope for all materials science applications.

Spectra 300 Transmission Electron Microscope advantages

All Spectra 300 (S)TEM’s are delivered on new platforms designed to offer an unprecedented level of mechanical stability and highest imaging quality though passive and (optional) active vibration isolation.

The system is housed in a fully redesigned enclosure with a built-in on-screen display for convenient specimen loading and removal. For the first time, full modularity and upgradeability can be offered between uncorrected and single-corrected configurations with variable heights, allowing maximum flexibility for different room configurations.

To truly optimize TEM and STEM imaging, EDX and EELS may require acquisition of different signals at different accelerating voltages. The rules may vary from sample to sample but, it is generally accepted that: 1) the best imaging is done at the highest possible accelerating voltage above which visible damage will occur, 2) EDX, especially when mapping, benefits from lower voltages with increased ionization cross-sections, thus yielding better signal-to-noise ratio maps for a given total dose, and 3) EELS works best at high voltages to avoid multiple scattering, which degrades the EELS signal with increasing sample thickness.

Built on an ultra-stable foundation

The Spectra Ultra S/TEM is delivered on a platform designed to offer an unprecedented level of mechanical stability quality through passive and (optional) active vibration isolation.

Like the Thermo Scientific Spectra 200 S/TEM and Spectra 300 S/TEM, the system is housed in a fully redesigned enclosure with a built-in on-screen display for convenient specimen loading and removal. For the first time, full modularity and upgradeability can be offered between uncorrected and single-corrected configurations with variable heights, allowing maximum flexibility for different room configurations.