\nTóm t\u1eaft n\u1ed9i dung<\/label>\n

Gi\u1edbi thi\u1ec7u<\/a><\/li>
K\u00ednh hi\u1ec3n vi chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i<\/a><\/li>
K\u00ednh hi\u1ec3n vi\u00a0ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c<\/a><\/li>
K\u00ednh hi\u1ec3n vi\u00a0ngu\u1ed3n s\u00e1ng t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai (DIC)<\/a><\/li><\/ul><\/nav><\/div>\n
<\/span>Gi\u1edbi thi\u1ec7u<\/strong><\/span><\/h2>\nK\u00ednh hi\u1ec3n vi<\/a> v\u1edbi ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ki\u1ec3m tra c\u00e1c m\u1eabu v\u1eadt m\u1edd \u0111\u1ee5c m\u00e0 c\u00e1c k\u1ef9 thu\u1eadt \u00e1nh s\u00e1ng truy\u1ec1n qua th\u00f4ng th\u01b0\u1eddng kh\u00f4ng th\u1ec3 ti\u1ebfp c\u1eadn \u0111\u01b0\u1ee3c. M\u1ed9t v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c coi l\u00e0 m\u1edd \u0111\u1ee5c n\u1ebfu m\u1ed9t ph\u1ea7n m\u1ecfng c\u00f3 \u0111\u1ed9 d\u00e0y kho\u1ea3ng 25 micromet kh\u00f4ng trong su\u1ed1t trong ph\u1ea1m vi ph\u1ed5 \u00e1nh s\u00e1ng kh\u1ea3 ki\u1ebfn \u200b\u200btrong kho\u1ea3ng t\u1eeb 450 \u0111\u1ebfn 650 nanomet. M\u1ed9t lo\u1ea1t c\u00e1c m\u1eabu v\u1eadt thu\u1ed9c lo\u1ea1i n\u00e0y, bao g\u1ed3m kim lo\u1ea1i, than \u0111\u00e1, g\u1ed7, x\u1ec9, \u0111\u00e1, nh\u1ef1a, h\u1ee3p kim, v\u1eadt li\u1ec7u t\u1ed5ng h\u1ee3p v\u00e0 x\u01b0\u01a1ng.\u00a0Nhi\u1ec1u m\u1eabu v\u1eadt m\u1edd \u0111\u1ee5c v\u00e0 trong su\u1ed1t c\u00f3 \u0111\u1eb7c \u0111i\u1ec3m bi\u00ean \u0111\u1ed9 ho\u1eb7c pha r\u00f5 r\u1ec7t.\u00a0C\u00e1c th\u00e0nh ph\u1ea7n ri\u00eang l\u1ebb c\u1ee7a c\u00e1c m\u1eabu c\u00f3 bi\u00ean \u0111\u1ed9 kh\u00e1c nhau v\u1ec1 l\u01b0\u1ee3ng h\u1ea5p th\u1ee5 \u00e1nh s\u00e1ng, trong khi c\u00e1c m\u1eabu c\u00f3 pha ch\u1ec9 kh\u00e1c nhau \u1edf chi\u1ebft su\u1ea5t c\u1ee7a c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m ri\u00eang l\u1ebb.\u00a0Trong th\u1ef1c t\u1ebf kh\u00f4ng c\u00f3 m\u1eabu c\u00f3 bi\u00ean \u0111\u1ed9 ho\u1eb7c pha thu\u1ea7n t\u00fay m\u00e0 \u0111\u1eb7c t\u00ednh n\u00e0y ho\u1eb7c \u0111\u1eb7c t\u00ednh kia chi\u1ebfm \u01b0u th\u1ebf.\u00a0M\u1eabu v\u1eadt m\u1edd \u0111\u1ee5c \u0111\u01b0\u1ee3c coi l\u00e0 m\u1eabu v\u1eadt pha n\u1ebfu ch\u00eanh l\u1ec7ch ph\u1ea3n x\u1ea1 gi\u1eefa c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m ri\u00eang l\u1ebb d\u01b0\u1edbi kho\u1ea3ng 10%.\u00a0Trong ph\u1ea7n n\u00e0y, ch\u00fang ta th\u1ea3o lu\u1eadn v\u1ec1 c\u00e1c c\u01a1 ch\u1ebf v\u00e0 c\u1ea5u h\u00ecnh quang h\u1ecdc kh\u00e1c nhau \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n trong k\u00ednh hi\u1ec3n vi<\/a> v\u1edbi ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1.<\/p>\n
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Trong c\u1ea5u h\u00ecnh ti\u00eau chu\u1ea9n c\u1ee7a n\u00f3, m\u1ed9t k\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 \u0111i\u1ec3n h\u00ecnh \u0111\u01b0\u1ee3c trang b\u1ecb s\u1eb5n \u0111\u1ec3 ki\u1ec3m tra c\u00e1c m\u1eabu bi\u00ean \u0111\u1ed9 (s\u1ef1 h\u1ea5p th\u1ee5) b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng t\u1edbi tr\u01b0\u1eddng s\u00e1ng.\u00a0C\u00e1c m\u1eabu h\u1ea5p th\u1ee5 t\u1ef1 nhi\u00ean \u0111\u01b0\u1ee3c ph\u00e2n bi\u1ec7t v\u1edbi c\u00e1c m\u1eabu pha \u0111\u01b0\u1ee3c chuy\u1ec3n th\u00e0nh m\u1eabu h\u1ea5p th\u1ee5 b\u1eb1ng c\u00e1ch x\u1eed l\u00fd h\u00f3a h\u1ecdc, ch\u1eb3ng h\u1ea1n nh\u01b0 kh\u1eafc v\u00e0 \u0111\u00e1nh b\u00f3ng m\u1eabu ho\u1eb7c ph\u1ee7 l\u00ean b\u1ec1 m\u1eb7t m\u1ed9t l\u1edbp m\u1ecfng, trong su\u1ed1t c\u00f3 \u0111\u1ed9 kh\u00fac x\u1ea1 cao.\u00a0\u0110\u01b0\u1ee3c tr\u00ecnh b\u00e0y trong H\u00ecnh 1 l\u00e0 c\u00e1c h\u00ecnh \u1ea3nh k\u1ef9 thu\u1eadt s\u1ed1 c\u00f3 ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 cho th\u1ea5y chi ti\u1ebft v\u1ec1 m\u1ed9t t\u00ednh n\u0103ng nh\u1ecf \u0111\u01b0\u1ee3c c\u1ed1 \u00fd \u0111\u1eb7t tr\u00ean b\u1ec1 m\u1eb7t chip m\u00e1y t\u00ednh b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng kim lo\u1ea1i bay h\u01a1i trong giai \u0111o\u1ea1n ch\u1ebf t\u1ea1o. H\u00ecnh 1(a) hi\u1ec3n th\u1ecb \u0111\u1eb7c \u0111i\u1ec3m trong tr\u01b0\u1eddng s\u00e1ng, trong khi H\u00ecnh 1(b), 1(c) v\u00e0 1(d) l\u1ea7n l\u01b0\u1ee3t hi\u1ec3n th\u1ecb c\u00f9ng m\u1ed9t tr\u01b0\u1eddng nh\u00ecn trong tr\u01b0\u1eddng t\u1ed1i, \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c v\u00e0 \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai (DIC)<\/b>\u00a0.\u00a0L\u01b0u \u00fd nh\u1eefng kh\u00e1c bi\u1ec7t \u0111\u00e1ng k\u1ec3 v\u1ec1 \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng c\u00e1c k\u1ef9 thu\u1eadt n\u00e0y.<\/p>\n
Kh\u1eafc h\u00f3a h\u1ecdc l\u00e0 m\u1ed9t trong nh\u1eefng ph\u01b0\u01a1ng ph\u00e1p ph\u1ed5 bi\u1ebfn nh\u1ea5t \u0111\u1ec3 t\u1ea1o \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n cho m\u1eabu kim lo\u1ea1i.\u00a0Trong k\u00ednh hi\u1ec3n vi<\/a>\u00a0v\u1edbi ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 s\u1eed d\u1ee5ng chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng s\u00e1ng, c\u00e1c c\u1ea5u tr\u00fac kh\u1eafc c\u1ee7a m\u1eabu \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng tr\u1edf n\u00ean nh\u00ecn th\u1ea5y \u0111\u01b0\u1ee3c do hi\u1ec7u \u1ee9ng b\u00f3ng \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1edfi nhi\u1ec1u c\u01a1 ch\u1ebf kh\u00e1c nhau, ch\u1eb3ng h\u1ea1n nh\u01b0 s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c ph\u00f9 \u0111i\u00eau, ph\u1ea3n x\u1ea1 do c\u00e1c l\u1edbp ph\u1ee7 ho\u1eb7c hi\u1ec7u \u1ee9ng ph\u1ea3n x\u1ea1 ph\u00e1t sinh t\u1eeb c\u00e1c h\u1ed1 kh\u1eafc. Vi\u1ec7c ch\u00fa \u00fd c\u1ea9n th\u1eadn \u0111\u1ebfn t\u1eebng chi ti\u1ebft trong qu\u00e1 tr\u00ecnh chu\u1ea9n b\u1ecb m\u1eabu l\u00e0 r\u1ea5t quan tr\u1ecdng \u0111\u1ec3 tr\u00e1nh t\u1ea1o t\u00e1c ho\u1eb7c hi\u1ec3u sai v\u1ec1 d\u1eef li\u1ec7u thu \u0111\u01b0\u1ee3c.\u00a0Trong h\u1ea7u h\u1ebft c\u00e1c tr\u01b0\u1eddng h\u1ee3p, m\u1eabu v\u1eadt \u0111\u01b0\u1ee3c chu\u1ea9n b\u1ecb m\u1edbi, \u0111\u01b0\u1ee3c m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c l\u00e0 c\u1ea7n thi\u1ebft \u0111\u1ec3 quan s\u00e1t v\u00e0 ghi l\u1ea1i c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m quan tr\u1ecdng c\u1ea7n quan t\u00e2m.\u00a0Qu\u00e1 tr\u00ecnh \u0103n m\u00f2n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n b\u1eb1ng c\u00e1c t\u00e1c nh\u00e2n h\u00f3a h\u1ecdc, \u0103n m\u00f2n \u0111i\u1ec7n ph\u00e2n, \u0103n m\u00f2n nhi\u1ec7t trong m\u00f4i tr\u01b0\u1eddng b\u00ecnh th\u01b0\u1eddng ho\u1eb7c trong ch\u00e2n kh\u00f4ng ho\u1eb7c kh\u00ed tr\u01a1. C\u1ea7n th\u1eadn tr\u1ecdng khi \u00e1p d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p kh\u1eafc h\u00f3a h\u1ecdc.\u00a0Qu\u00e1 tr\u00ecnh n\u00e0y th\u01b0\u1eddng l\u00e0m h\u1ecfng c\u00e1c th\u00e0nh ph\u1ea7n c\u1ea5u tr\u00fac c\u1ee7a m\u1eabu \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng, n\u01a1i c\u00e1c tinh th\u1ec3 nh\u1ecf b\u1ecb m\u1ea5t \u0111i.\u00a0Trong nh\u1eefng tr\u01b0\u1eddng h\u1ee3p n\u00e0y, m\u1eabu v\u1eadt ch\u1ec9 c\u00f3 th\u1ec3 hi\u1ec3n th\u1ecb c\u00e1c ranh gi\u1edbi tinh th\u1ec3, kh\u00f4ng ph\u00e2n bi\u1ec7t \u0111\u01b0\u1ee3c theo s\u1ef1 thay \u0111\u1ed5i pha.<\/p>\n
C\u00f3 th\u1ec3 tr\u00e1nh \u0111\u01b0\u1ee3c s\u1ef1 h\u01b0 h\u1ea1i c\u1ee7a m\u1eabu v\u00e0 m\u1ea5t s\u1ef1 ph\u00e2n bi\u1ec7t pha b\u1eb1ng c\u00e1ch \u00e1p d\u1ee5ng c\u00e1c l\u1edbp giao thoa bay h\u01a1i cho m\u1eabu.\u00a0K\u1ef9 thu\u1eadt v\u1eadt l\u00fd thu\u1ea7n t\u00fay n\u00e0y s\u1eed d\u1ee5ng ch\u1ea5t kh\u00fac x\u1ea1 m\u1ecfng, trong su\u1ed1t (nh\u01b0 titan dioxide, k\u1ebdm selenide ho\u1eb7c k\u1ebdm Telluride) t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c pha c\u1ee7a m\u1eabu, c\u00f3 th\u1ec3 bay h\u01a1i tr\u00ean b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng.\u00a0Nhi\u1ec1u ph\u1ea3n x\u1ea1 v\u00e0 hi\u1ec7u \u1ee9ng giao thoa do m\u00e0ng bay h\u01a1i t\u1ea1o ra l\u00e0m t\u0103ng \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n \u0111\u1ec3 m\u1eabu c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ki\u1ec3m tra trong \u00e1nh s\u00e1ng ph\u1ea3n x\u1ea1 tr\u01b0\u1eddng s\u00e1ng.\u00a0Trong s\u1ed1 c\u00e1c th\u00f4ng s\u1ed1 quan tr\u1ecdng c\u1ea7n xem x\u00e9t khi ph\u1ee7 m\u1eabu l\u00e0 chi\u1ebft su\u1ea5t c\u1ee7a pha m\u1eabu, chi\u1ebft su\u1ea5t v\u00e0 \u0111\u1ed9 d\u00e0y c\u1ee7a m\u00e0ng bay h\u01a1i v\u00e0 b\u01b0\u1edbc s\u00f3ng \u00e1nh s\u00e1ng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ch\u1ee5p \u1ea3nh.\u00a0Trong nhi\u1ec1u tr\u01b0\u1eddng h\u1ee3p, chi\u1ebfu s\u00e1ng \u0111\u01a1n s\u1eafc \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng h\u01a1n \u00e1nh s\u00e1ng tr\u1eafng b\u0103ng th\u00f4ng r\u1ed9ng.\u00a0M\u1ed9t b\u1ed9 l\u1ecdc nhi\u1ec5u c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u1eafp v\u00e0o \u0111\u00e8n chi\u1ebfu d\u1ecdc \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 s\u00e1ng v\u1edbi m\u00e0u s\u1eafc ho\u1eb7c d\u1ea3i b\u01b0\u1edbc s\u00f3ng c\u1ee5 th\u1ec3.<\/p>\n
\u0110\u1ed9 t\u01b0\u01a1ng ph\u1ea3n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u0103ng c\u01b0\u1eddng theo t\u1eebng pha, v\u00ed d\u1ee5 nh\u01b0 tr\u00ean b\u1ec1 m\u1eb7t kim lo\u1ea1i \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng, s\u1eed d\u1ee5ng bu\u1ed3ng ph\u1ea3n \u1ee9ng kh\u00ed-ion.\u00a0K\u1ef9 thu\u1eadt n\u00e0y s\u1eed d\u1ee5ng kh\u00ed d\u01b0 \u0111\u01b0\u1ee3c ion h\u00f3a b\u1eb1ng chi\u1ebfu x\u1ea1 \u0111i\u1ec7n t\u1eed sao cho b\u1ec1 m\u1eb7t m\u1eabu th\u1eed ti\u1ebfp x\u00fac v\u1edbi kh\u00ed trong bu\u1ed3ng ch\u00e2n kh\u00f4ng.\u00a0Khi oxy \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m kh\u00ed d\u01b0, c\u00e1c pha m\u1eabu kh\u00e1c nhau t\u1ea1o th\u00e0nh c\u00e1c l\u1edbp oxit l\u00e0m ph\u00e1t sinh m\u00e0u s\u1eafc do s\u1ef1 h\u1ea5p th\u1ee5 v\u00e0 giao thoa khi ki\u1ec3m tra trong \u00e1nh s\u00e1ng ph\u1ea3n x\u1ea1 tr\u01b0\u1eddng s\u00e1ng.\u00a0M\u1ee9c \u0111\u1ed9 t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n b\u1ecb \u1ea3nh h\u01b0\u1edfng b\u1edfi lo\u1ea1i kh\u00ed d\u01b0, \u00e1p su\u1ea5t ch\u00e2n kh\u00f4ng, m\u1eadt \u0111\u1ed9 d\u00f2ng \u0111i\u1ec7n t\u1eed ph\u00e1t ra t\u1eeb c\u1ef1c \u00e2m, \u0111i\u1ec7n \u00e1p ph\u00f3ng \u0111i\u1ec7n v\u00e0 nhi\u1ec7t \u0111\u1ed9 c\u1ee7a b\u1ec1 m\u1eb7t m\u1eabu th\u1eed.\u00a0C\u00f3 th\u1ec3 tr\u00e1nh nhi\u1ec5m b\u1ea9n b\u1eb1ng c\u00e1ch l\u00e0m n\u00f3ng m\u1eabu, gi\u1ea3m m\u1eadt \u0111\u1ed9 d\u00f2ng \u0111i\u1ec7n v\u00e0 s\u1eed d\u1ee5ng ion oxy trong bu\u1ed3ng.\u00a0K\u1ef9 thu\u1eadt n\u00e0y c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng cho c\u00e1c m\u1eabu phi kim lo\u1ea1i \u0111\u1ec3 t\u1ea1o \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n cho v\u1eadt li\u1ec7u n\u00f3i chung.\u00a0N\u00f3i chung, c\u00e1c m\u1eabu \u0111\u01b0\u1ee3c kh\u1eafc v\u00e0 ph\u1ee7 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c quan s\u00e1t b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng c\u00e1c v\u1eadt k\u00ednh ph\u1ea3n x\u1ea1 c\u00f3 kho\u1ea3ng c\u00e1ch l\u00e0m vi\u1ec7c d\u00e0i ti\u00eau chu\u1ea9n.<\/p>\n
<\/span>K\u00ednh hi\u1ec3n vi<\/a> chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i<\/strong><\/span><\/h2>\n
Chi\u1ebfu s\u00e1ng b\u1eb1ng \u00e1nh s\u00e1ng ph\u1ea3n x\u1ea1 tr\u01b0\u1eddng t\u1ed1i \u0111\u1eb7c bi\u1ec7t h\u1eefu \u00edch \u0111\u1ec3 ph\u00e1t hi\u1ec7n c\u00e1c v\u1ebft n\u1ee9t v\u00e0 ranh gi\u1edbi h\u1ea1t trong c\u00e1c m\u1eabu v\u1eadt b\u00e1n \u0111\u1ee5c. C\u00e1c s\u1ea3n ph\u1ea9m oxy h\u00f3a th\u01b0\u1eddng c\u00f3 m\u00e0u s\u1eafc n\u1ed9i t\u1ea1i \u0111\u1eb7c tr\u01b0ng v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng c\u1ee7a m\u1eabu \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111o b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng \u00e1nh s\u00e1ng tr\u01b0\u1eddng t\u1ed1i. Tr\u00ean n\u1ec1n t\u1ed1i, c\u00e1c v\u1ebft x\u01b0\u1edbc khi \u0111\u00e1nh b\u00f3ng xu\u1ea5t hi\u1ec7n d\u01b0\u1edbi d\u1ea1ng c\u00e1c \u0111\u01b0\u1eddng s\u00e1ng. Trong chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i, ch\u1ec9 c\u00e1c m\u1eb7t s\u00f3ng ph\u00e1t sinh do ph\u1ea3n x\u1ea1 t\u00e1n x\u1ea1 b\u1edfi c\u00e1c ph\u1ea7n t\u1eed c\u1ea5u tr\u00fac trong m\u1eabu v\u1eadt m\u1edbi c\u00f3 th\u1ec3 \u0111i v\u00e0o v\u1eadt k\u00ednh. Nh\u1eefng m\u1eb7t s\u00f3ng ph\u1ea3n x\u1ea1 b\u1edfi c\u00e1c ph\u1ea7n t\u1eed b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u1eb7t vu\u00f4ng g\u00f3c v\u1edbi tr\u1ee5c quang c\u1ee7a k\u00ednh hi\u1ec3n vi<\/a> kh\u00f4ng ch\u1ea1m t\u1edbi v\u1eadt k\u00ednh v\u00e0 c\u00e1c v\u00f9ng n\u00e0y v\u1eabn t\u1ed1i. C\u1ea5u h\u00ecnh thi\u1ebft b\u1ecb c\u00f3 m\u1ed9t \u0111\u0129a che m\u1edd \u0111\u1ee5c \u0111\u01b0\u1ee3c \u0111\u1eb7t v\u00e0o \u0111\u01b0\u1eddng d\u1eabn \u00e1nh s\u00e1ng trong \u0111\u00e8n chi\u1ebfu th\u1eb3ng \u0111\u1ee9ng sao cho ch\u1ec9 c\u00e1c m\u1eb7t s\u00f3ng ngo\u1ea1i vi m\u1edbi ch\u1ea1m t\u1edbi g\u01b0\u01a1ng l\u1ec7ch ph\u00eda tr\u00ean v\u1eadt k\u00ednh. S\u00f3ng ph\u1ea3n x\u1ea1 b\u1edfi g\u01b0\u01a1ng truy\u1ec1n qua m\u1ed9t v\u00f2ng r\u1ed7ng bao quanh v\u1eadt k\u00ednh v\u00e0 d\u00f9ng \u0111\u1ec3 chi\u1ebfu s\u00e1ng m\u1eabu v\u1eadt (xem H\u00ecnh 2) \u1edf c\u00e1c g\u00f3c xi\u00ean l\u1edbn.<\/p>\n
<\/p>\n
K\u00ednh hi\u1ec3n vi<\/a> chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i ch\u1ee9a m\u1ed9t \u0111\u00e8n chi\u1ebfu th\u1eb3ng \u0111\u1ee9ng ti\u00eau chu\u1ea9n trong \u0111\u00f3 \u00e1nh s\u00e1ng b\u1ecb l\u1ec7ch xu\u1ed1ng ph\u00eda v\u1eadt k\u00ednh th\u00f4ng qua c\u1ee5m b\u1eadc g\u01b0\u01a1ng v\u00e0 m\u1ed9t g\u01b0\u01a1ng kh\u00e1c c\u00f3 l\u1ed7 h\u00ecnh b\u1ea7u d\u1ee5c (xem H\u00ecnh 2). Sau khi c\u00e1c m\u1eb7t s\u00f3ng ph\u1ea3n x\u1ea1 \u0111i qua m\u1ed9t \u1ed1ng b\u1ecdc b\u00ean trong th\u00f9ng trang tr\u00ed v\u1eadt k\u00ednh, ch\u00fang t\u00e1c \u0111\u1ed9ng l\u00ean m\u1ed9t g\u01b0\u01a1ng l\u00f5m h\u00ecnh v\u00f2ng h\u01b0\u1edbng ch\u00fang v\u1ec1 ph\u00eda b\u1ec1 m\u1eb7t m\u1eabu v\u1eadt \u1edf g\u00f3c t\u1edbi cao.\u00a0C\u00e1c th\u00e0nh ph\u1ea7n quang h\u1ecdc c\u1ee7a v\u1eadt k\u00ednh kh\u00f4ng \u0111\u00f3ng g\u00f3p v\u00e0o vi\u1ec7c chi\u1ebfu s\u00e1ng m\u1eabu v\u1eadt.\u00a0Ngo\u00e0i ra, ch\u1ec9 nh\u1eefng m\u1eb7t s\u00f3ng \u0111\u01b0\u1ee3c ph\u1ea3n x\u1ea1 khu\u1ebfch t\u00e1n b\u1edfi b\u1ec1 m\u1eb7t m\u1eabu v\u1eadt m\u1edbi ch\u1ea1m t\u1edbi th\u00e0nh ph\u1ea7n th\u1ea5u k\u00ednh v\u1eadt k\u00ednh ph\u00eda tr\u01b0\u1edbc v\u00e0 \u0111\u00f3ng g\u00f3p \u00edt nhi\u1ec1u v\u00e0o \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n trong h\u00ecnh \u1ea3nh tr\u01b0\u1eddng t\u1ed1i.\u00a0\u0110\u1ed9 t\u01b0\u01a1ng ph\u1ea3n cao nh\u1ea5t \u0111\u1ea1t \u0111\u01b0\u1ee3c khi n\u1ec1n m\u00e0u \u0111en v\u00e0 c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m c\u1ea5u tr\u00fac (ch\u1eb3ng h\u1ea1n nh\u01b0 ranh gi\u1edbi h\u1ea1t) \u0111\u01b0\u1ee3c quan s\u00e1t d\u01b0\u1edbi d\u1ea1ng c\u00e1c th\u1ef1c th\u1ec3 s\u00e1ng.\u00a0L\u01b0u \u00fd r\u1eb1ng trong k\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 tr\u01b0\u1eddng t\u1ed1i, c\u00e1c m\u00e0ng ch\u1eafn s\u00e1ng v\u00e0 kh\u1ea9u \u0111\u1ed9 trong \u0111\u00e8n chi\u1ebfu th\u1eb3ng \u0111\u1ee9ng ph\u1ea3i \u0111\u01b0\u1ee3c m\u1edf \u0111\u1ebfn \u0111i\u1ec3m r\u1ed9ng nh\u1ea5t c\u1ee7a ch\u00fang \u0111\u1ec3 ch\u00f9m \u00e1nh s\u00e1ng chi\u1ebfu v\u00e0o c\u1ee5m g\u01b0\u01a1ng kh\u00f4ng b\u1ecb ch\u1eb7n m\u1ed9t ph\u1ea7n. H\u00ecnh \u1ea3nh trong H\u00ecnh 2(b) l\u00e0 h\u00ecnh \u1ea3nh \u00e1nh s\u00e1ng ph\u1ea3n chi\u1ebfu tr\u01b0\u1eddng t\u1ed1i c\u1ee7a b\u1ec1 m\u1eb7t c\u1ee7a chip m\u00e1y t\u00ednh vi x\u1eed l\u00fd.<\/p>\n
K\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 hi\u1ec7n \u0111\u1ea1i \u0111\u01b0\u1ee3c trang b\u1ecb c\u00e1c ph\u1ee5 ki\u1ec7n \u0111\u1ec3 chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i mang \u0111\u1ebfn nhi\u1ec1u c\u1ea3i ti\u1ebfn. Trong s\u1ed1 n\u00e0y c\u00f3 kh\u1ea3 n\u0103ng d\u1ef1ng h\u00ecnh \u1ea3nh t\u1ea1o ra c\u00e1c ch\u1eef c\u00e1i kh\u00f4ng b\u1ecb \u0111\u1ea3o ng\u01b0\u1ee3c (\u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng trong c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn) khi ch\u1ee5p \u1ea3nh ho\u1eb7c ch\u1ee5p \u1ea3nh k\u1ef9 thu\u1eadt s\u1ed1.\u00a0C\u00e1c t\u00ednh n\u0103ng quan tr\u1ecdng b\u1ed5 sung hi\u1ec7n di\u1ec7n tr\u00ean b\u1ec1 m\u1eb7t m\u1eabu v\u1eadt c\u0169ng \u0111\u01b0\u1ee3c \u0111\u1ecbnh v\u1ecb theo \u0111\u00fang h\u01b0\u1edbng trong h\u00ecnh \u1ea3nh b\u1eb1ng k\u1ef9 thu\u1eadt h\u00ecnh \u1ea3nh d\u1ef1ng \u0111\u1ee9ng.\u00a0Vi\u1ec7c h\u1ea7u h\u1ebft c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t chuy\u1ec3n sang h\u1ec7 th\u1ed1ng quang h\u1ecdc hi\u1ec7u ch\u1ec9nh v\u00f4 c\u1ef1c gi\u00fap lo\u1ea1i b\u1ecf h\u00ecnh \u1ea3nh lo\u1ea1n th\u1ecb th\u01b0\u1eddng \u0111\u01b0\u1ee3c t\u1ea1o ra do s\u1eed d\u1ee5ng g\u01b0\u01a1ng b\u00e1n ph\u1ea7n, \u0111\u1eb7c bi\u1ec7t khi c\u00e1c th\u00e0nh ph\u1ea7n ph\u1ee5 tr\u1ee3 \u0111\u01b0\u1ee3c th\u00eam v\u00e0o \u0111\u01b0\u1eddng d\u1eabn quang. V\u1eadt k\u00ednh tr\u01b0\u1eddng s\u00e1ng v\u00e0 tr\u01b0\u1eddng t\u1ed1i \u0111\u01b0\u1ee3c hi\u1ec7u ch\u1ec9nh v\u00f4 c\u1ef1c do m\u1ed9t s\u1ed1 nh\u00e0 s\u1ea3n xu\u1ea5t cung c\u1ea5p mang l\u1ea1i tr\u01b0\u1eddng nh\u00ecn hi\u1ec7u qu\u1ea3 t\u0103ng l\u00ean v\u00e0 kho\u1ea3ng c\u00e1ch l\u00e0m vi\u1ec7c r\u1ed9ng \u0111\u1ec3 n\u00e2ng cao hi\u1ec7u su\u1ea5t quang h\u1ecdc, \u0111\u1eb7c bi\u1ec7t l\u00e0 khi k\u1ebft h\u1ee3p v\u1edbi th\u1ecb k\u00ednh c\u00f3 tr\u01b0\u1eddng nh\u00ecn c\u1ef1c r\u1ed9ng. H\u1ec7 th\u1ed1ng chi\u1ebfu s\u00e1ng m\u1edbi ti\u00ean ti\u1ebfn gi\u00fap chuy\u1ec3n \u0111\u1ed5i nhanh ch\u00f3ng v\u00e0 d\u1ec5 d\u00e0ng gi\u1eefa ngu\u1ed3n \u00e1nh s\u00e1ng vonfram-halogen v\u00e0 th\u1ee7y ng\u00e2n ho\u1eb7c xenon n\u0103ng l\u01b0\u1ee3ng cao \u0111\u1ec3 cung c\u1ea5p \u00e1nh s\u00e1ng t\u1ed1i \u01b0u cho c\u00e1c m\u1eabu v\u1eadt tr\u01b0\u1eddng t\u1ed1i m\u1edd.\u00a0Ngo\u00e0i ra, m\u1ed9t s\u1ed1 k\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 c\u00f3 c\u00e1c th\u00e0nh ph\u1ea7n quang h\u1ecdc b\u00ean trong cung c\u1ea5p kh\u1ea3 n\u0103ng ph\u00f3ng \u0111\u1ea1i thu ph\u00f3ng t\u00edch h\u1ee3p \u0111\u1ec3 h\u1ed7 tr\u1ee3 l\u1ea5y n\u00e9t v\u00e0 cho ph\u00e9p ph\u00f3ng \u0111\u1ea1i trung gian.<\/p>\n
Nh\u1eefng ti\u1ebfn b\u1ed9 g\u1ea7n \u0111\u00e2y trong k\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c th\u00fac \u0111\u1ea9y b\u1edfi ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn, khoa h\u1ecdc v\u1eadt li\u1ec7u v\u00e0 s\u1ef1 ph\u00e1t tri\u1ec3n b\u00f9ng n\u1ed5 c\u1ee7a k\u00ednh hi\u1ec3n vi hu\u1ef3nh quang<\/a> d\u00f9ng trong ch\u1ea9n \u0111o\u00e1n y t\u1ebf v\u00e0 khoa h\u1ecdc t\u1ebf b\u00e0o. Kh\u1ea3 n\u0103ng chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i \u0111\u1ec3 l\u1ed9 \u0111\u01b0\u1eddng vi\u1ec1n, c\u1ea1nh, ranh gi\u1edbi, v\u1ebft x\u01b0\u1edbc, l\u1ed7 kim v\u00e0 \u0111\u1ed9 d\u1ed1c ch\u1ec9 s\u1ed1 kh\u00fac x\u1ea1 cung c\u1ea5p m\u1ed9t ph\u01b0\u01a1ng ti\u1ec7n \u0111\u1ec3 b\u1ed5 sung cho c\u00e1c d\u1ea1ng k\u00ednh hi\u1ec3n vi<\/a> kh\u00e1c bao g\u1ed3m tr\u01b0\u1eddng s\u00e1ng, \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi ph\u00e2n, \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n \u0111i\u1ec1u ch\u1ebf Hoffman v\u00e0 k\u1ef9 thu\u1eadt \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c.\u00a0Khi k\u1ebft h\u1ee3p v\u1edbi nhau, nh\u1eefng k\u1ef9 thu\u1eadt t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n n\u00e0y th\u01b0\u1eddng c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn nh\u1eefng hi\u1ec3u bi\u1ebft m\u1edbi v\u1ec1 c\u00e1c chi ti\u1ebft c\u1ee5 th\u1ec3 c\u1ee7a m\u1eabu v\u1eadt \u0111ang \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u.<\/p>\n
<\/span>K\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c<\/strong><\/span><\/h2>\n
K\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c (H\u00ecnh 3) l\u00e0 m\u1ed9t k\u1ef9 thu\u1eadt ph\u00f9 h\u1ee3p \u0111\u1ec3 ki\u1ec3m tra c\u00e1c b\u1ec1 m\u1eb7t ch\u1ee9a c\u00e1c c\u1ea5u tr\u00fac l\u00e0m thay \u0111\u1ed5i tr\u1ea1ng th\u00e1i ph\u00e2n c\u1ef1c trong qu\u00e1 tr\u00ecnh ph\u1ea3n x\u1ea1. V\u00ed d\u1ee5, c\u00e1c h\u1ea1t c\u1ea5u tr\u00fac trong m\u1eabu qu\u1eb7ng v\u00e0 m\u1ed9t s\u1ed1 h\u1ee3p kim kim lo\u1ea1i v\u00e0 m\u00e0ng m\u1ecfng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ki\u1ec3m tra d\u1ec5 d\u00e0ng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p n\u00e0y.\u00a0Trong c\u1ea5u h\u00ecnh quang h\u1ecdc \u0111\u01b0\u1ee3c ph\u00e1c th\u1ea3o trong H\u00ecnh 3, c\u00e1c m\u1eb7t s\u00f3ng chi\u1ebfu s\u00e1ng g\u1eb7p m\u1ed9t b\u1ed9 ph\u00e2n c\u1ef1c \u0111\u01b0\u1ee3c \u0111\u1eb7t trong b\u1ed9 chi\u1ebfu s\u00e1ng th\u1eb3ng \u0111\u1ee9ng tr\u01b0\u1edbc b\u1ed9 ph\u1eadn g\u01b0\u01a1ng h\u01b0\u1edbng \u00e1nh s\u00e1ng v\u00e0o v\u1eadt k\u00ednh.\u00a0C\u00e1c s\u00f3ng \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c tuy\u1ebfn t\u00ednh \u0111\u01b0\u1ee3c t\u1eadp trung v\u00e0o b\u1ec1 m\u1eb7t m\u1eabu v\u1eadt v\u00e0 ph\u1ea3n x\u1ea1 tr\u1edf l\u1ea1i v\u1eadt k\u00ednh.\u00a0Sau khi r\u1eddi kh\u1ecfi kh\u1ea9u \u0111\u1ed9 v\u1eadt k\u00ednh d\u01b0\u1edbi d\u1ea1ng m\u1ed9t b\u00f3 m\u1eb7t s\u00f3ng song song, \u00e1nh s\u00e1ng sau \u0111\u00f3 \u0111\u01b0\u1ee3c chi\u1ebfu l\u00ean b\u1ea3n ph\u00e2n c\u1ef1c th\u1ee9 hai (m\u00e1y\u00a0ph\u00e2n t\u00edch<\/b>) \u0111\u01b0\u1ee3c \u0111\u1ecbnh h\u01b0\u1edbng m\u1ed9t g\u00f3c 90 \u0111\u1ed9 so v\u1edbi b\u1ea3n ph\u00e2n c\u1ef1c.\u00a0Ch\u1ec9 c\u00e1c m\u1eb7t s\u00f3ng kh\u1eed c\u1ef1c ho\u1eb7c d\u1ecbch chuy\u1ec3n m\u1edbi c\u00f3 th\u1ec3 \u0111i qua m\u00e1y ph\u00e2n t\u00edch \u0111\u1ec3 \u0111\u1ebfn th\u1ea5u k\u00ednh \u1ed1ng.\u00a0M\u1ed9t t\u1ea5m lambda ph\u1ee5 c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c l\u1eafp ngay tr\u01b0\u1edbc m\u00e1y ph\u00e2n t\u00edch trong d\u00e3y quang h\u1ecdc \u0111\u1ec3 x\u00e1c \u0111\u1ecbnh d\u1ea5u hi\u1ec7u l\u01b0\u1ee1ng chi\u1ebft ho\u1eb7c \u0111\u1ec3 th\u00eam m\u00e0u (chuy\u1ec3n m\u00e0u x\u00e1m sang \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n m\u00e0u).\u00a0Trong tr\u01b0\u1eddng h\u1ee3p v\u1eadt k\u00ednh c\u00f3 \u0111\u1ed9 ph\u00f3ng \u0111\u1ea1i r\u1ea5t th\u1ea5p \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c ph\u1ea3n x\u1ea1, m\u1ed9t t\u1ea5m quang h\u1ecdc c\u00f3 th\u1ec3 xoay (\u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 n\u1eafp\u00a0Antiflex<\/b>\u00a0) bao g\u1ed3m m\u1ed9t t\u1ea5m lambda b\u01b0\u1edbc s\u00f3ng m\u1ed9t ph\u1ea7n t\u01b0 \u0111\u01b0\u1ee3c \u0111\u1eb7t tr\u00ean th\u00e0nh ph\u1ea7n th\u1ea5u k\u00ednh ph\u00eda tr\u01b0\u1edbc v\u1eadt k\u00ednh \u0111\u1ec3 ch\u1eb7n s\u1ef1 ph\u1ea3n x\u1ea1 t\u1eeb ch\u00ednh v\u1eadt k\u00ednh.<\/p>\n
<\/p>\n
C\u00e1c m\u1eabu d\u1ecb h\u01b0\u1edbng khi s\u1eed d\u1ee5ng trong k\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c, s\u1ebd xu\u1ea5t hi\u1ec7n t\u1ed1i n\u1ebfu c\u00e1c ph\u1ea3n x\u1ea1 ch\u00ednh \u0111\u01b0\u1ee3c \u0111\u1ecbnh h\u01b0\u1edbng song song v\u1edbi c\u00e1c g\u00f3c ph\u01b0\u01a1ng v\u1ecb truy\u1ec1n c\u1ee7a b\u1ea3n ph\u00e2n c\u1ef1c ho\u1eb7c m\u00e1y ph\u00e2n t\u00edch. \u1ede v\u1ecb tr\u00ed ch\u00e9o (45 \u0111\u1ed9 so v\u1edbi tr\u1ee5c ph\u00e2n c\u1ef1c), m\u1ed7i m\u1eb7t s\u00f3ng t\u1edbi \u0111\u01b0\u1ee3c chia th\u00e0nh hai th\u00e0nh ph\u1ea7n ph\u1ea3n x\u1ea1 t\u1ea1o th\u00e0nh m\u1eb7t s\u00f3ng h\u00ecnh elip khi b\u1ecb ph\u1ea3n x\u1ea1 b\u1edfi b\u1ec1 m\u1eb7t l\u01b0\u1ee1ng chi\u1ebft (do ch\u1ec9 s\u1ed1 kh\u00fac x\u1ea1 ho\u1eb7c s\u1ef1 bi\u1ebfn \u0111\u1ed5i h\u1ea5p th\u1ee5 kh\u00e1c nhau).\u00a0N\u1ebfu c\u00e1c th\u00e0nh ph\u1ea7n ph\u1ea3n x\u1ea1 n\u00e0y c\u00f3 th\u1ec3 t\u1ea1o ra nhi\u1ec5u \u1edf m\u00e1y ph\u00e2n t\u00edch th\u00ec h\u00ecnh \u1ea3nh thu \u0111\u01b0\u1ee3c s\u1ebd s\u00e1ng v\u00e0 c\u00f3 th\u1ec3 c\u00f3 m\u00e0u.\u00a0M\u00e1y ph\u00e2n t\u00edch c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c th\u00e1o ra \u0111\u1ec3 ki\u1ec3m tra c\u00e1c h\u1ea1t c\u00f3 h\u01b0\u1edbng kh\u00e1c nhau b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p g\u1ecdi l\u00e0\u00a0\u0111a s\u1eafc ph\u1ea3n x\u1ea1<\/b>.\u00a0\u0110\u1ed9 t\u01b0\u01a1ng ph\u1ea3n trong k\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c \u0111\u01b0\u1ee3c t\u1ea1o ra b\u1edfi c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m d\u1ecb h\u01b0\u1edbng c\u1ee7a m\u1eabu v\u1eadt, hi\u1ec7u \u1ee9ng quang t\u1eeb, \u0103n m\u00f2n s\u00e2u ho\u1eb7c l\u1edbp ph\u1ee7 l\u01b0\u1ee1ng chi\u1ebft. H\u00ecnh \u1ea3nh trong H\u00ecnh 3(b) l\u00e0 tr\u01b0\u1eddng nh\u00ecn c\u1ee7a chip m\u00e1y t\u00ednh gi\u1ed1ng nh\u01b0 H\u00ecnh 2(b), ngo\u1ea1i tr\u1eeb s\u01a1 \u0111\u1ed3 chi\u1ebfu s\u00e1ng l\u00e0 \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c ph\u1ea3n x\u1ea1 ch\u1ee9 kh\u00f4ng ph\u1ea3i tr\u01b0\u1eddng t\u1ed1i.<\/p>\n
Chu\u1ea9n b\u1ecb m\u1eabu c\u1ea9n th\u1eadn l\u00e0 \u0111i\u1ec1u c\u1ea7n thi\u1ebft \u0111\u1ec3 th\u00e0nh c\u00f4ng trong k\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c. Trong c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u1ecba ch\u1ea5t, \u0111\u1ed9 d\u00e0y ti\u00eau chu\u1ea9n cho c\u00e1c m\u1eb7t c\u1eaft \u0111\u00e1 m\u1ecfng l\u00e0 25 \u0111\u1ebfn 30 micromet.\u00a0M\u1eabu c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c m\u00e0i b\u1eb1ng b\u00e1nh xe th\u1ea5m kim c\u01b0\u01a1ng v\u00e0 sau \u0111\u00f3 \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n b\u1eb1ng tay \u0111\u1ebfn \u0111\u1ed9 d\u00e0y ch\u00ednh x\u00e1c b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng b\u1ed9t m\u00e0i m\u00f2n c\u00f3 k\u00edch th\u01b0\u1edbc h\u1ea1t gi\u1ea3m d\u1ea7n.\u00a0M\u1eabu th\u1eed cu\u1ed1i c\u00f9ng ph\u1ea3i c\u00f3 n\u1eafp k\u00ednh \u0111\u01b0\u1ee3c g\u1eafn b\u1eb1ng ch\u1ea5t k\u1ebft d\u00ednh quang h\u1ecdc trong su\u1ed1t.\u00a0C\u00e1c v\u1eadt li\u1ec7u m\u1ec1m h\u01a1n c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chu\u1ea9n b\u1ecb theo ph\u01b0\u01a1ng ph\u00e1p t\u01b0\u01a1ng t\u1ef1 nh\u01b0 c\u00e1c m\u1eabu sinh h\u1ecdc s\u1eed d\u1ee5ng m\u00e1y c\u1eaft vi th\u1ec3.\u00a0 K\u00ednh hi\u1ec3n vi<\/a> ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c cung c\u1ea5p m\u1ed9t l\u01b0\u1ee3ng l\u1edbn th\u00f4ng tin v\u1ec1 th\u00e0nh ph\u1ea7n v\u00e0 c\u1ea5u tr\u00fac ba chi\u1ec1u c\u1ee7a nhi\u1ec1u m\u1eabu.\u00a0Th\u1ef1c t\u1ebf kh\u00f4ng gi\u1edbi h\u1ea1n v\u1ec1 ph\u1ea1m vi, k\u1ef9 thu\u1eadt n\u00e0y c\u00f3 th\u1ec3 ti\u1ebft l\u1ed9 th\u00f4ng tin v\u1ec1 l\u1ecbch s\u1eed nhi\u1ec7t v\u00e0 \u1ee9ng su\u1ea5t m\u00e0 m\u1eabu v\u1eadt ph\u1ea3i ch\u1ecbu trong qu\u00e1 tr\u00ecnh h\u00ecnh th\u00e0nh.\u00a0H\u1eefu \u00edch trong s\u1ea3n xu\u1ea5t v\u00e0 nghi\u00ean c\u1ee9u, k\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c l\u00e0 m\u1ed9t c\u00f4ng c\u1ee5 \u0111i\u1ec1u tra v\u00e0 ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng t\u01b0\u01a1ng \u0111\u1ed1i r\u1ebb ti\u1ec1n v\u00e0 d\u1ec5 ti\u1ebfp c\u1eadn, c\u00f3 th\u1ec3 cung c\u1ea5p th\u00f4ng tin kh\u00f4ng c\u00f3 \u1edf b\u1ea5t k\u1ef3 k\u1ef9 thu\u1eadt n\u00e0o kh\u00e1c.<\/p>\n
<\/span>K\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai (DIC)<\/strong><\/span><\/h2>\n
M\u1ed9t trong nh\u1eefng k\u1ef9 thu\u1eadt m\u1ea1nh m\u1ebd nh\u1ea5t \u0111\u1ec3 \u0111\u01b0a \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n v\u00e0o h\u00ecnh \u1ea3nh \u00e1nh s\u00e1ng ph\u1ea3n x\u1ea1 l\u00e0 \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai, cho ph\u00e9p h\u00ecnh dung s\u1ef1 kh\u00e1c bi\u1ec7t v\u1ec1 \u0111\u1ed9 cao t\u1eebng ph\u00fat tr\u00ean c\u00e1c b\u1ec1 m\u1eb7t.\u00a0Trong c\u1ea5u h\u00ecnh quang h\u1ecdc (H\u00ecnh 4), m\u1ed9t l\u0103ng k\u00ednh l\u01b0\u1ee1ng chi\u1ebft (c\u00f2n \u0111\u01b0\u1ee3c g\u1ecdi l\u00e0 l\u0103ng k\u00ednh\u00a0Wollaston<\/b>\u00a0ho\u1eb7c\u00a0Nomarski<\/b>, t\u00f9y theo thi\u1ebft k\u1ebf) \u0111\u01b0\u1ee3c \u0111\u1eb7t trong kh\u00f4ng gian v\u00f4 c\u1ef1c ngay ph\u00eda tr\u00ean v\u1eadt k\u00ednh v\u00e0 m\u1ed9t b\u1ed9 ph\u00e2n c\u1ef1c \u0111\u01b0\u1ee3c l\u1eafp v\u00e0o \u0111\u00e8n chi\u1ebfu th\u1eb3ng \u0111\u1ee9ng (t\u01b0\u01a1ng t\u1ef1 nh\u01b0 \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c). L\u0103ng k\u00ednh chia m\u1eb7t s\u00f3ng \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c th\u00e0nh hai ch\u00f9m ph\u00e2n c\u1ef1c tr\u1ef1c giao, \u0111\u1ecbnh h\u01b0\u1edbng m\u1ed9t g\u00f3c 45 \u0111\u1ed9 so v\u1edbi b\u1ea3n ph\u00e2n c\u1ef1c, tr\u00ean \u0111\u01b0\u1eddng \u0111i t\u1edbi m\u1eabu v\u1eadt.\u00a0Nh\u1eefng ch\u00f9m \u00e1nh s\u00e1ng vu\u00f4ng g\u00f3c n\u00e0y t\u00e1c \u0111\u1ed9ng l\u00ean m\u1eabu v\u1eadt \u0111\u1ec3 t\u1ea1o ra s\u1ef1 d\u1ecbch chuy\u1ec3n ngang \u1edf nh\u1eefng v\u00f9ng c\u00f3 b\u1ec1 m\u1eb7t n\u1ed5i.\u00a0N\u1ebfu b\u1ec1 m\u1eb7t ho\u00e0n to\u00e0n b\u1eb1ng ph\u1eb3ng th\u00ec kh\u00f4ng quan s\u00e1t \u0111\u01b0\u1ee3c \u0111\u1eb7c \u0111i\u1ec3m n\u00e0o.\u00a0Tuy nhi\u00ean, v\u00ed d\u1ee5, n\u1ebfu c\u00f3 m\u1ed9t b\u01b0\u1edbc nh\u1ecf gi\u1eefa hai m\u1eb7t s\u00f3ng (xem H\u00ecnh 4), th\u00ec m\u1ed9t trong c\u00e1c ch\u00f9m tia ph\u1ea3i truy\u1ec1n \u0111i m\u1ed9t \u0111\u01b0\u1eddng \u0111i d\u00e0i h\u01a1n v\u00e0 \u0111\u01b0\u1ee3c g\u00e1n \u0111\u1ed9 l\u1ec7ch \u0111\u01b0\u1eddng \u0111i n\u00e0y.\u00a0Khi c\u00e1c ch\u00f9m tia song song quay tr\u1edf l\u1ea1i k\u00ednh hi\u1ec3n vi<\/a> sau khi \u0111i qua v\u1eadt k\u00ednh v\u00e0 l\u0103ng k\u00ednh, ch\u00fang s\u1ebd \u0111i qua b\u1ed9 ph\u00e2n c\u1ef1c th\u1ee9 hai (m\u00e1y ph\u00e2n t\u00edch), n\u01a1i giao thoa t\u1ea1o ra h\u00ecnh \u1ea3nh trung gian trong \u0111\u00f3 s\u1ef1 kh\u00e1c bi\u1ec7t v\u1ec1 \u0111\u01b0\u1eddng \u0111i \u0111\u01b0\u1ee3c chuy\u1ec3n th\u00e0nh gi\u00e1 tr\u1ecb m\u00e0u x\u00e1m m\u00e0 m\u1eaft c\u00f3 th\u1ec3 nh\u00ecn th\u1ea5y.\u00a0T\u01b0\u01a1ng t\u1ef1 nh\u01b0 k\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c, t\u1ea5m lambda c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111\u1eb7t b\u00ean d\u01b0\u1edbi m\u00e1y ph\u00e2n t\u00edch \u0111\u1ec3 chuy\u1ec3n gi\u00e1 tr\u1ecb m\u00e0u x\u00e1m th\u00e0nh m\u00e0u s\u1eafc.<\/p>\n
<\/p>\n
C\u00e1c th\u00e0nh ph\u1ea7n quang h\u1ecdc c\u1ea7n thi\u1ebft \u0111\u1ec3 quan s\u00e1t \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n nhi\u1ec5u vi ph\u00e2n kh\u00f4ng che ho\u1eb7c c\u1ea3n tr\u1edf kh\u1ea9u \u0111\u1ed9 v\u1eadt k\u00ednh, do \u0111\u00f3 cho ph\u00e9p s\u1eed d\u1ee5ng thi\u1ebft b\u1ecb \u1edf kh\u1ea9u \u0111\u1ed9 s\u1ed1 \u0111\u1ea7y \u0111\u1ee7.\u00a0\u0110i\u1ec1u n\u00e0y d\u1eabn \u0111\u1ebfn s\u1ef1 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 v\u1ec1 \u0111\u1ed9 ph\u00e2n gi\u1ea3i.\u00a0Ngo\u00e0i ra, \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai t\u1ea1o ra h\u00ecnh \u1ea3nh c\u00f3 th\u1ec3 d\u1ec5 d\u00e0ng thao t\u00e1c b\u1eb1ng k\u1ef9 thu\u1eadt h\u00ecnh \u1ea3nh k\u1ef9 thu\u1eadt s\u1ed1 v\u00e0 video \u0111\u1ec3 t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n h\u01a1n n\u1eefa. M\u1ed9t trong nh\u1eefng c\u00e2n nh\u1eafc quan tr\u1ecdng nh\u1ea5t trong nhi\u1ec1u ph\u00f2ng th\u00ed nghi\u1ec7m, khi so s\u00e1nh DIC v\u1edbi \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c ho\u1eb7c \u00e1nh s\u00e1ng tr\u01b0\u1eddng t\u1ed1i, l\u00e0 chi ph\u00ed c\u1ee7a c\u00e1c b\u1ed9 ph\u1eadn ph\u1ee5 ki\u1ec7n.\u00a0B\u1edfi v\u00ec DIC y\u00eau c\u1ea7u m\u1ed9t s\u1ed1 l\u0103ng k\u00ednh Nomarski l\u01b0\u1ee1ng chi\u1ebft \u0111\u1eaft ti\u1ec1n v\u00e0 c\u00e1c b\u1ed9 ph\u1eadn quang h\u1ecdc kh\u00f4ng b\u1ecb bi\u1ebfn d\u1ea1ng (ch\u1ee7 y\u1ebfu l\u00e0 v\u1eadt k\u00ednh), n\u00ean thi\u1ebft b\u1ecb n\u00e0y \u0111\u1eaft h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi h\u1ea7u h\u1ebft c\u00e1c k\u1ef9 thu\u1eadt t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n kh\u00e1c.\u00a0Trong nhi\u1ec1u tr\u01b0\u1eddng h\u1ee3p, ch\u1ee7 y\u1ebfu l\u00e0 khi ch\u1ee5p \u1ea3nh vi m\u00f4 v\u00e0\/ho\u1eb7c ch\u1ee5p \u1ea3nh k\u1ef9 thu\u1eadt s\u1ed1 kh\u00f4ng \u0111\u01b0\u1ee3c xem x\u00e9t ch\u00ednh, vi\u1ec7c chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i th\u01b0\u1eddng s\u1ebd ph\u1ee5c v\u1ee5 m\u1ee5c \u0111\u00edch c\u1ee7a ph\u00f2ng th\u00ed nghi\u1ec7m ki\u1ec3m tra c\u00e1c m\u1eabu v\u1eadt kim lo\u1ea1i.\u00a0Tuy nhi\u00ean, khi ph\u1ea3i thu \u0111\u01b0\u1ee3c h\u00ecnh \u1ea3nh c\u00f3 \u0111\u1ed9 ph\u00e2n gi\u1ea3i cao trong c\u00e1c m\u1eabu c\u00f3 pha trong su\u1ed1t, \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi ph\u00e2n l\u00e0 k\u1ef9 thu\u1eadt l\u1ef1a ch\u1ecdn t\u1ed1i \u01b0u.\u00a0H\u00ecnh \u1ea3nh trong H\u00ecnh 4(b) l\u00e0 tr\u01b0\u1eddng nh\u00ecn c\u1ee7a chip m\u00e1y t\u00ednh gi\u1ed1ng nh\u01b0 H\u00ecnh 2(b) v\u00e0 H\u00ecnh 3(b), ngo\u1ea1i tr\u1eeb s\u01a1 \u0111\u1ed3 chi\u1ebfu s\u00e1ng \u0111\u01b0\u1ee3c ph\u1ea3n \u00e1nh \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai thay v\u00ec tr\u01b0\u1eddng t\u1ed1i ho\u1eb7c \u00e1nh s\u00e1ng ph\u00e2n c\u1ef1c.<\/p>\n
C\u00e1c nh\u00e0 k\u00ednh hi\u1ec3n vi v\u00e0 k\u1ef9 s\u01b0 quang h\u1ecdc hi\u1ec7n \u0111\u1ea1i \u0111\u00e3 ph\u00e1t tri\u1ec3n m\u1ed9t lo\u1ea1t c\u00e1c k\u1ef9 thu\u1eadt h\u1eefu \u00edch \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 h\u1ed7 tr\u1ee3 t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n, cung c\u1ea5p kh\u1ea3 n\u0103ng quan s\u00e1t t\u1ed1t h\u01a1n v\u00e0 h\u1ed7 tr\u1ee3 thu th\u1eadp \u1ea3nh vi m\u00f4 v\u00e0 h\u00ecnh \u1ea3nh k\u1ef9 thu\u1eadt s\u1ed1 c\u1ee7a nhi\u1ec1u lo\u1ea1i m\u1eabu v\u1eadt.\u00a0 K\u00ednh hi\u1ec3n vi<\/a> chi\u1ebfu s\u00e1ng tr\u01b0\u1eddng t\u1ed1i c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 t\u0103ng kh\u1ea3 n\u0103ng hi\u1ec3n th\u1ecb c\u1ee7a c\u00e1c m\u1eabu v\u1eadt thi\u1ebfu \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n \u0111\u1ee7 kh\u00f3 quan s\u00e1t b\u1eb1ng k\u00ednh hi\u1ec3n vi<\/a> tr\u01b0\u1eddng s\u00e1ng ti\u00eau chu\u1ea9n, trong khi DIC l\u00e0 m\u1ed9t c\u01a1 ch\u1ebf tuy\u1ec7t v\u1eddi \u0111\u1ec3 hi\u1ec3n th\u1ecb \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n trong c\u00e1c m\u1eabu trong su\u1ed1t. Tuy nhi\u00ean, k\u00ednh hi\u1ec3n vi<\/a>\u00a0ngu\u1ed3n s\u00e1ng ph\u00e2n c\u1ef1c \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 quan s\u00e1t v\u00e0 ch\u1ee5p \u1ea3nh c\u00e1c m\u1eabu v\u1eadt c\u00f3 th\u1ec3 nh\u00ecn th\u1ea5y ch\u1ee7 y\u1ebfu do \u0111\u1eb7c t\u00ednh d\u1ecb h\u01b0\u1edbng quang h\u1ecdc c\u1ee7a ch\u00fang, do \u0111\u00f3 c\u1ea3i thi\u1ec7n ch\u1ea5t l\u01b0\u1ee3ng h\u00ecnh \u1ea3nh thu \u0111\u01b0\u1ee3c b\u1eb1ng v\u1eadt li\u1ec7u l\u01b0\u1ee1ng chi\u1ebft khi so s\u00e1nh v\u1edbi c\u00e1c k\u1ef9 thu\u1eadt kh\u00e1c nh\u01b0 tr\u01b0\u1eddng t\u1ed1i, tr\u01b0\u1eddng s\u00e1ng v\u00e0 \u0111\u1ed9 t\u01b0\u01a1ng ph\u1ea3n giao thoa vi sai.<\/p>\n
Ngu\u1ed3n: https:\/\/zeiss-campus.magnet.fsu.edu\/articles\/basics\/reflectedcontrast.html<\/a><\/em><\/p>\n
C\u00f4ng ty Minh Khang l\u00e0 nh\u00e0 ph\u00e2n ph\u1ed1i \u0111\u1ed9c quy\u1ec1n th\u1ecb tr\u01b0\u1eddng mi\u1ec1n Nam ph\u00e2n kh\u00fac k\u00ednh hi\u1ec3n vi h\u00e3ng\u00a0Carl ZEISS<\/a>.<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"
Gi\u1edbi thi\u1ec7u K\u00ednh hi\u1ec3n vi v\u1edbi ngu\u1ed3n s\u00e1ng ph\u1ea3n x\u1ea1 ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ki\u1ec3m tra c\u00e1c m\u1eabu v\u1eadt m\u1edd \u0111\u1ee5c m\u00e0 c\u00e1c k\u1ef9 thu\u1eadt \u00e1nh s\u00e1ng truy\u1ec1n qua th\u00f4ng th\u01b0\u1eddng kh\u00f4ng th\u1ec3 ti\u1ebfp c\u1eadn \u0111\u01b0\u1ee3c. M\u1ed9t v\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c coi l\u00e0 m\u1edd \u0111\u1ee5c n\u1ebfu m\u1ed9t ph\u1ea7n m\u1ecfng c\u00f3 \u0111\u1ed9 d\u00e0y kho\u1ea3ng 25…<\/p>\n","protected":false},"author":3,"featured_media":10199,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"rank_math_lock_modified_date":false,"footnotes":""},"categories":[40],"tags":[],"class_list":["post-10198","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-tin-tuc"],"acf":[],"_links":{"self":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/posts\/10198"}],"collection":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/comments?post=10198"}],"version-history":[{"count":4,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/posts\/10198\/revisions"}],"predecessor-version":[{"id":10202,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/posts\/10198\/revisions\/10202"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/media\/10199"}],"wp:attachment":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/media?parent=10198"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/categories?post=10198"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/tags?post=10198"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}