Demand for high-performance, energy-efficient electronics is driving the development of advanced devices with ever smaller, more densely packed features and complex 3D structures. Ramping production of these cutting-edge microprocessors, memory devices, and other products is extremely challenging and requires high-resolution, atomic-scale analysis of features buried deep within the device.\u00a0Transmission electron microscopy (TEM)\u00a0is increasingly becoming the go-to technique for this kind of analysis and relies on high-quality samples produced with focused ion beam (FIB) milling.<\/p>\n
The Thermo Scientific Helios 5 EXL DualBeamis a 300mm full-wafer focused ion beam scanning electron microscope (FIB-SEM), designed to address TEM sample preparation challenges in the semiconductor industry. The Helios 5 EXL DualBeam is capable of preparing samples for today\u2019s most advanced process nodes, including sub-5nm and gate-all-around technology.<\/p>\n
Utilizing advanced machine learning and closed-loop end pointing, the Helios 5 EXL DualBeam delivers enhanced cut placement precision and enables you to consistently extract high-quality lamella from your most challenging samples.<\/p>\n
Advanced machine-learning automation capabilities make ultra-thin TEM sample generation routine and consistent, providing unparalleled, sub-nanometer insight into more interfaces, films, and profiles to measure at sub-nanometer resolution.\u00a0The Helios 5 EXL DualBeam\u00a0ensures efficient and consistent TEM sample preparation workflows by combining wafer and defect navigation with recipe definition and execution in a single, fully integrated program. This automation supports a higher tool-to-operator ratio, maximizing sample throughput and technical resource productivity.<\/p>\n","protected":false},"excerpt":{"rendered":"
FIB-SEM TEM sample preparation for the semiconductor industry, enabling full-wafer analysis.<\/p>\n","protected":false},"featured_media":12104,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"rank_math_lock_modified_date":false},"product_cat":[5637],"product_tag":[5678,5697,2344],"class_list":{"0":"post-12105","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-focused-ion-beam-scanning-electron-microscopes-fib-sem","7":"product_tag-focused-ion-beam-scanning-electron-microscope-fib-sem","8":"product_tag-helios-5-exl-en","9":"product_tag-thermo-fisher-scientific-en","10":"yith_product_brand-thermo-fisher-scientific-en","12":"first","13":"instock","14":"shipping-taxable","15":"product-type-simple"},"acf":[],"_links":{"self":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/product\/12105"}],"collection":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/comments?post=12105"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/media\/12104"}],"wp:attachment":[{"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/media?parent=12105"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/product_cat?post=12105"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/gd-1.com\/wp-json\/wp\/v2\/product_tag?post=12105"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}