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Apreo ChemiSEM – Scanning Electron Microscopes

High-performance imaging with integrated chemical analysis and structural characterization

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The new Thermo Scientific Apreo ChemiSEM System supports your materials science research by simplifying the imaging process, making it accessible to both expert users and newcomers alike. With innovative features like Smart Frame Integration (SFI) and newly developed autofocus and autostigmation functions, it can help you easily obtain clear, high-resolution images as well as results for elemental analysis (EDS) and diffraction (EBSD).

Thermo Scientific ChemiSEM Technology integrates energy dispersive spectroscopy (EDS) capabilities directly into the microscope’s user interface, which simplifies analysis and helps deliver reliable results with minimal user bias. With live quantification algorithms and automated data processing, ChemiSEM Technology delivers speed and accuracy to help you easily uncover hidden features and gain a more comprehensive understanding of your materials.

Apreo ChemiSEM System Apreo ChemiSEM S System
High vacuum 
30 kV (S/TEM)  0.7 nm 0.7 nm
15 kV (BD) 0.9 nm 0.5 nm
15 kV (6.4 nA, WD 10 mm) – 1.9 nm
1 kV 1.2 nm 0.9 nm
1 kV (BD) 1.0 nm 0.8 nm
1 kV (BD, WD 10 mm)  – 1.0 nm
Low vacuum (optional)
3 kV (80 Pa) 1.8 nm 1.8 nm
15 kV (80 Pa) 1.2 nm 1.2 nm

BD: Beam deceleration mode.

WD: Working distance. Resolutions are at optimum working distance unless otherwise specified. By default, upon final installation, the resolution is proven in the system’s acceptance test at 1kV and 30 kV in high vacuum and with immersion switched on, if applicable.

Detectors

  • Trinity Detection System (in-lens and in-column)
    • T1 segmented lower in-lens detector
    • T2 upper in-lens detector
    • T3 in-column detector (optional)
  • ETD: Everhart-Thornley SE detector
  • DBS: Retractable segmented under-the-lens BSED (optional)
  • Low-vacuum SE detector (optional)
  • DBS-GAD: Lens-mounted gaseous analytical BSED (optional)
  • STEM 3+ retractable segmented detector (BF, DF, HADF, HAADF) (optional)
  • IR-CCD
  • Thermo Scientific Nav-Cam™ Camera (chamber-mounted)

ChemiSEM Technology

  • TrueSight and TrueSight Pro; Detector size: 25 or 70 mm2
  • Resolution up to 125 eV Mn Κα₁@10,000 cps
  • Fully automated insert and retract with shutter for safe operation
  • ‘Super Insert’ position for maximum solid angle and throughput
  • Detection range: Be-Am
  • Light element sensitivity down to silicon (Si Lα)

TruePix Detector

  • Hybrid pixelated Direct Electron Detection EBSD system based on Timepix technology
  • Zero readout noise, high signal to background
  • Zero distortion due to lens/ fibre optic coupling or phosphor
  • Single electron counting
  • Sensitivity down to 4 keV
  • 2000 FPS maximum throughput
  • Equivalent >3000 pps/nA sensitivity on Ni
  • Fully integrated into Thermo Scientific xTal View software for on- and offline analysis
  • Seamless workflow between SEM, EDS and EBSD functions

System, sample holders and chamber

  • Landing energy range: 20 eV to 30 keV
  • Beam deceleration with stage bias from ­–4,000 V to +600 V
  • Optional low-vacuum mode (10–500 Pa chamber pressure)
  • Stage: Eucentric goniometer stage, 5-axis, motorized; XY movements 110 x 110 mm, tilt –15° / +90°; maximum sample weight up to 5 kg at 0° tilt
  • Beam current range: 1 pA to 50 nA (400 nA configuration also available)
  • Sample holder: Standard multi-purpose holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (12 mm diameter), three pre-tilted stubs, cross-section samples, and two pre-tilted row-bar holders (optional) (38° and 90°); no tools required to mount a sample
  • Chamber: 340 mm inside width, 12 ports, Coplanar EDS/EBSD orthogonal to the tilt axis of the stage

Enhanced SEM imaging performance for every user and every sample

The Thermo Scientific Apreo ChemiSEM System provides high performance for many different materials thanks to simultaneous in-column detection and excellent imaging results. The compound lens filter and advanced imaging strategies further boost its capabilities to address a variety of challenging applications.

Optimized analytical solutions

Thermo Scientific ChemiSEM Technology seamlessly integrates imaging and chemical characterization into a single platform with advanced EDS capabilities and phase analysis. The newly developed TruePix Electron Backscatter Diffraction (EBSD) Detector delivers high-speed direct electron detection for outstanding low beam energy performance and single particle counting.

Chemical and structural characterization workflows

The Apreo ChemiSEM System’s new and improved characterization approach provides a holistic view of sample properties, from morphology to chemical and structural composition. With easy-to-use and clear analysis software, it offers fast time to data and reliable results for a comprehensive understanding of specimen structure and composition.

Automated SEM imaging workflows

The new Smart Frame Integration (SFI), which uses advanced digital enhancement and precise detector models, combines with fast and reliable autofunctions to enhance the user experience and further simplify imaging workflows.

Fast and reliable autofunctions offer the convenience of avoiding the daily challenges associated with system alignment. These autofunctions are particularly beneficial for novice users who may not have the expertise to achieve high-resolution results manually. By automating the alignment process, these functions save valuable time for experienced operators, allowing them to dedicate more effort to data analysis instead of spending excessive time fine-tuning the tool.

Apreo ChemiSEM System durability and reliability

Designed to withstand demanding laboratory environments, the Apreo ChemiSEM System offers extended source lifetime and schedulable routine upgrades. Thanks to dedicated software tools, issues can be quickly resolved throughout the instrument’s entire lifespan, and software updates are automatically delivered to help you get the most out of your investment.

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